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Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusAST 2800 RTP

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Mattson AST 2800 RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMattson
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Mattson AST 2800
Specifications
Configuration—Refurbished[1]
Manufacturer—Mattson[1]
Model—AST 2800[1]
Equipment type—Rapid Thermal Process (RTP) system[1]
Category—Thermal / Diffusion[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com