Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusAlpha 805 D

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Tokyo Electron Alpha 805 D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Alpha 805 DTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Alpha 805
Specifications
Configuration—PIQ[1]
Manufacturer—Tokyo Electron[2]
Model—Alpha 805 D[1]
Equipment type—Furnace[1]
Category—Thermal / Diffusion[2]
Wafer size—8 inch[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com