Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, YES 450 PB 8-2 P-CP Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | YES 450 |
| Specifications | ||
| Configuration | — | High Temp[1] |
| Power Supply | — | 208 V, 3 Phase, 150 A[1] |
| Install Type | — | Stand Alone[1] |
| Manuals included | — | STD[1] |
| Handler Type | — | NA, Manual Load[1] |
| # of Cassette / FOUP Loaders | — | 1 each 8", 2 each 6"[1] |
| SW Options | — | SEC / GEM Package[1] |
| Backing Pumps | — | 2 each Scroll Pumps[1] |
| Gas | — | N2, Ar, O2, CDA[1] |
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