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Kestrel 650versus200 PCU

Applied Materials Kestrel 650, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Kestrel 650Applied Materials
200 PCUAxcelis
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2000 Vintage
Control system——
Generation——
FamilyApplied Materials Kestrel 650Axcelis NV GSD 200
Cited variants—
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
Specifications
CategoryIon Implantation[3]—
Tool typeImplanter[4]—
P/N—SC 4840 A[5]
Frequency—50 Hz[5]
Phase—3 Phase[5]
Voltage—400 V[5]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]inventory listing