Comparison ledger
ASML PAS 2400, Brooks 017-0024-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PAS 2400ASML | 017-0024-01 PrealignerBrooks |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1985 Demonstration and first contract | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML PAS 2400 | Brooks 017-0024-01 Prealigner |
| Specifications | ||
| Throughput | 90 wafers per hour[1] | — |
| Alignment method | Grid profile[1] | — |
| Wafer stage drive | Electric motors[1] | — |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →