Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis NV GSD HE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | NV GSD HEAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis NV GSD HE |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | Refurbished[3] |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | — |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Wafer size | — | Wafer can be converted back to 8"[3] |
| High level of safety | — | No stored H2, but on demand instant generation[3] |
| Serial number | — | 090084[5] |
| Manufacturing year | — | 2000[5] |
| Refurbishment | — | Refurbished[3] |
| Replacement | — | Both front and rear Cyro pumps by the OEM[3] |
| Upgrade | — | A low pressure H2 upgrade was performed[3] |
| System configuration | — | End station, disk module, final energy magnet, linac module, gas box, source[4] |
| Power supply | — | High voltage power supply[3] |
| Terminal power supplies | — | Filament, bias, arc, magnet, source magnet[3] |
| Vacuum pumps | — | Both front and rear Cryo pumps by the OEM[3] |
| Gas delivery | — | All gas box elements[3] |
| Ion source | — | Two new SAC IHC ion sources[3] |
| Chamber configuration | — | 1 Chamber, 1 Load Port[5] |
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