Comparison ledger
Axcelis 17099370 Outer strike plate, Edwards EPX 180 NE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | EPX 180 NEEdwards |
|---|---|---|
| OEM | Axcelis | Edwards |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2008 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Edwards EPX 180 NE |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | — |
| Pumping speed | — | 106 CFM[2] |
| Ultimate vacuum | — | < 7 x 10^-5 Torr[2] |
| Inlet | — | ISO63[2] |
| Exhaust | — | KF25[2] |
| Weight | — | 104 lbs[2] |
| Voltage | — | 200/208V[3] |
| Frequency | — | 50/60 Hz[3] |
| Current | — | 16 Amps[3] |
| Display and control panel | — | Integrated[3] |
| Gas purge | — | High temperature gas purge assembly[3] |
| Mounting | — | Metric eyebolt / heavy duty mount base[3] |
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