Comparison ledger
Axcelis 200 ACU, Lam Research SEZ 203 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | SEZ 203 SpinLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research SEZ |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[6] | Process; Backside Clean[2] |
| Manufacturer | Axcelis[6] | — |
| Model | 200 ACU[6] | 203[1] |
| Tool type | Asher[6] | — |
| Wafer size | 200mm[8] | 8 inch (200mm)[2] |
| Serial number | AU6A356AH[8] | — |
| Computer system | M 200 PC, M 200[9] | — |
| Part number | SC 4572 A[9] | — |
| Volts | 208[9] | — |
| Amps | 30[9] | — |
| Equipment type | Asher[6] | Spin Etcher[1] |
| Wafer configuration | 8 inch[7] | — |
| Software Version | — | 12.29.09.2000[2] |
| CIM | — | GEM[2] |
| Handler System | — | Robot[2] |
| Factory Interface | — | SMIF (2)[2] |
| Process | — | Cobalt Backside Clean[3] |
| Options System | — | UPS[3] |
| Vintage | — | 1998[3] |
| Wafer Handling | — | Bernoulli (chuck, grippers, handling)[4] |
| Open cassettes | — | 2[4] |
| Chemical cabinets (CDS) | — | 3[4] |
| System type | — | Spin Processing Wet System[5] |
| Make | — | Lam / SEZ[1] |
| Wafer carrier | — | Two open cassettes[4] |
| Chemical cabinets | — | 3 chemical cabinets (CDS)[4] |
| Wafer handling | — | Bernoulli wafer handling[4] |
| Chuck | — | Bernoulli chuck[4] |
| Grippers | — | Bernoulli grippers[4] |
| Wafer Sizes | — | 8 inch[2] |
| Bernoulli wafer handling | — | Yes[4] |
| Bernoulli chuck | — | Yes[4] |
| Bernoulli grippers | — | Yes[4] |
| OEM | — | Lam / SEZ[1] |
| Chemical Cabinets | — | 3 (CDS)[4] |
| Vintage year | — | 1998[3] |
| Wafer handling type | — | Bernoulli (chuck, grippers)[4] |
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