Comparison ledger
Axcelis 200 ACU, Plasma-Therm 790 + RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 790 + RIEPlasma-Therm |
|---|---|---|
| OEM | Axcelis | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Plasma-Therm 790 + RIE |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Process type | — | Reactive ion etcher / reactive ion etch system[5] |
| Configured for | — | RIE (Reactive Ion Etching) processing of silicon substrates[6] |
| Maximum wafer size | — | 200 mm[7] |
| Platen size | — | 279 mm[7] |
| Platen/sample table | — | 6" water cooled sample table[8] |
| RF power supply | — | 500 W RF power supply[8] |
| RF generator | — | 500W RF generator[9] |
| RF frequency | — | 13.56 MHz[9] |
| Electrodes | — | 240 mm diameter[9] |
| Chamber | — | Non load-locked chamber[9] |
| Gas delivery | — | Shower head gas delivery system[9] |
| Gas channels | — | Six MFC gas channels[9] |
| Process gases | — | SF6, CHF3, CF4, oxygen (O2), argon (Ar); previous gases also listed as AR, N2, O2, SF6, CHF3, CF4[7] |
| Pressure range | — | < 900 mTorr[7] |
| Power range | — | < 350 W[7] |
| Vacuum system | — | Turbo pumped vacuum system with roughing pump[9] |
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