Comparison ledger
Axcelis 200 ACU, Tokyo Electron Trias 200 SPA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Trias 200 SPATokyo Electron |
|---|---|---|
| OEM | Axcelis | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tokyo Electron Trias 200 SPA |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[3] | — |
| Manufacturer | Axcelis[3] | — |
| Model | 200 ACU[3] | — |
| Tool type | Asher[3] | — |
| Wafer size | 200mm[5] | — |
| Serial number | AU6A356AH[5] | — |
| Computer system | M 200 PC, M 200[6] | — |
| Part number | SC 4572 A[6] | — |
| Volts | 208[6] | — |
| Amps | 30[6] | — |
| Equipment type | Asher[3] | — |
| Wafer configuration | 8 inch[4] | — |
| Wafer Size | — | 300 mm[1] |
| Process Type | — | Dry Etch[1] |
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