Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, EV Group 120 Automated Coater Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | |
|---|---|---|
| OEM | Axcelis | EV Group |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | EV Group 120 Automated Coater Processing |
| Specifications | ||
| Configuration | 14 Amps[1] | 50/60 Hz[3] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | 50/60 Hz[3] |
| Phase | 3 Phase[1] | 3 Phase[3] |
| Wafer sizes | — | 6 inch, 8 inch[3] |
| Wiring configuration | — | 4 Wire + GND[3] |
| Vintage | — | 2015[3] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →