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GSD 200 E High Currentversus0216 7696, E 11368072 ESC

Axcelis GSD 200 E High Current, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
GSD 200 E High CurrentAxcelis
0216 7696, E 11368072 ESCVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Varian 0216 7696, E 11368072 ESC
Specifications
Configuration—Platen ADV-S Type[1]
Type—ESC Platen ADV-S Type[1]
Category—Ion Implantation[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com