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Comparison ledger

GSD 200 E High Currentversus160 XP Ion

Axcelis GSD 200 E High Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
GSD 200 E High CurrentAxcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Varian 160 XP Ion
Specifications
Configuration—150mm High Current IMP[1]
OEM—Varian[2]
Model—160 XP Ion[2]
Category—Ion Implantation[1]
Tool type—ion implanter[1]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing