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Comparison ledger

M 150 PC UVversus0 V 500

Axcelis M 150 PC UV, Blue M 0 V 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMAxcelisBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis M 150 PC UVBlue M 0 V 500
Specifications
ConfigurationDoes not include boards[1]—
MakeAxcelis[1]—
ModelM 150 PC[1]—
Equipment typeUV Cure System[2]—
Wafer size6 inch[1]—
Vintage2001 Vintage[1]—
Does not include boardsDoes not include boards[2]—
Wafer Sizes6 inch[1]—
CategoryThermal / Diffusion[2]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com