Comparison ledger
Axcelis NV 8250, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8250Axcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8250 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Configuration | Backside[1] | Platen ADV-S Type[3] |
| Wafer Sizes | 8 inch[2] | — |
| Energy Range | 0-250 keV[2] | — |
| Power Requirement | 208 VAC, 100 A, 50/60 Hz, 3 Phase[2] | — |
| Programmable Auto Tilt | 0-75 degrees[2] | — |
| Single Stage Extraction | 15-40 keV[2] | — |
| Ion Source Type | ELS[2] | — |
| Source Material Type | Moly[2] | — |
| Electrostatic Chuck (ESC) | Yes[2] | — |
| Parallel Beam using Hybrid Scanning | Yes[2] | — |
| 90 degrees Radially Indexed Dipole Magnet | Yes[2] | — |
| Signal Tower | Yes[2] | — |
| SECS II / GEM Interface | Yes[2] | — |
| Cassette Interface | Asyst Bolt-On SMIF (2), Cassette Stages (3), Automatic Flat/Notch Alignment, Programmable Flat Orient[2] | — |
| Controller | Sun Sparc Station V, Application SW Ver. 4.3.2, Auto Start-Up & Computer Monitoring[2] | — |
| Pump / Cryogenics | Source Pump: TMP; Beam Pump: TMP (2) and Cryo Pump (8" Torr, Non On-board); End Station Pump: 2 Cryo Pump (8" Torr, Non On-Board); Cryo Compressor: CTI 8500; Remote Disk Chiller[2] | — |
| Gas Configuration | AsH3 - SDS, PH3 - SDS, BF3 - SDS, Ar - HP[2] | — |
| Energy Filter System Option | Yes[2] | — |
| Vintage | 1999 (Backside)[1] | — |
| Source Pump | TMP[2] | — |
| Beam Pump | TMP (2)[2] | — |
| End Station Pump | 2 Cryo Pump (8" Torr, Non On-Board)[2] | — |
| Cryo Compressor | CTI 8500[2] | — |
| Type | — | ESC Platen ADV-S Type[3] |
| Category | — | Ion Implantation[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →