Waferpedia

Comparison ledger

20 36 Surfaceversus841 Back

Blanchard 20 36 Surface, Disco 841 Back, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
20 36 SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 20 36 SurfaceDisco 841 Back
Specifications
ConfigurationWith new Elecro-Matic Neutrol II Magnetic Chuck Control[1]—
Magnetic Chuck ControlElectro-Matic Neutrol II[1]—
Wafer size range—4 to 8 inches (100-200 mm)[2]
Grinding type—In-feed grinding with wafer rotation[2]
Number of spindles—2[2]
Spindle speed range—1000-7000 rpm[2]
Vertical stroke—110 mm[2]
Chuck table type—Porous chuck table with vacuum chuck[2]
Grinding wheel diameter—8 inches[2]
Cassette capacity—Two cassettes for loading/unloading[2]
Planarity accuracy (within wafer)—0.0015 mm[2]
Compliance—EC CE marking and SEMI S2-93 (DFG841)[2]
Dimensions (W x D x H)—1050 mm x 2150 mm x 1710 mm[2]
Electrical requirements—200V, 3 Phase, 50/60 Hz[2]
CDA pressure—0.5-0.8 MPa[2]
DI water pressure and flow—0.2-0.3 MPa, 15 l/min or higher[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]s3-alliance.coms3-alliance.com