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0 500versusFormula

Blue M 0 500, Tokyo Electron Formula, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
FormulaTokyo Electron
OEMBlue MTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Tokyo Electron Formula
Cited variants—
  • 12-inch TEOS / HF / F2 configuration[1]
  • 12-inch DCS / NH3 / HF / F2 configuration[2]
  • DCS SiN configuration[3]
  • Formula TEOS / HF / F2[1]
  • Formula DCS / NH3 / HF / F2[2]
  • Formula DCS SiN[3]
Specifications
ManufacturerBlue M[4]—
Model0 500[4]—
Asset number139866[4]—
Last confirm dateSeptember 10, 2025[4]—
Equipment typeOven[4]—
Configuration—TEOS / HF / F2[1]
Wafer size—12 inch[2]
Process chemistry—TEOS / HF / F2[1]
Vintage—2002[2]
Wafer Size—12 inch (300 mm)[1]
Process Chemistry (variant)—TEOS / HF / F2[1]
Vintage (listed unit)—2002[1]
Process capabilities—TEOS, HF, F2, DCS, NH3, SiN[1]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing