Waferpedia

Comparison ledger

0 V 500versusPCO2-14

Blue M 0 V 500, Despatch PCO2-14, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
PCO2-14Despatch
OEMBlue MDespatch
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Despatch PCO2-14
Specifications
Heating—Electrically heated[1]
Designed use—Hard baking polyimide coatings[1]
Atmosphere—Inert atmosphere[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org