Waferpedia

Comparison ledger

0 V 500versus1500EXL

Blue M 0 V 500, Heller 1500EXL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
1500EXLHeller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller 1500EXL
Cited variants—
Specifications
Series—EXL Series[1]
Heating zones—Five heating zones[1]
Cooling zones—One internal cooling zone[1]
Profiling—Five thermocouple profiling[1]
Line speed—Up to 28 inches (70 cm) per minute[1]
Airflow improvement—25% higher airflow compared to previous designs[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]semiconductoronline.comsemiconductoronline.com