Comparison ledger
Blue M 0 V 500, Tokyo Electron Telindy Plus ALD High K Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | Telindy Plus ALD High K VerticalTokyo Electron |
|---|---|---|
| OEM | Blue M | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Tokyo Electron Telindy Plus ALD High K Vertical |
| Specifications | ||
| Manufacturer | — | Tokyo Electron[1] |
| Model | — | Telindy Plus ALD High K Vertical[2] |
| Category | — | Thermal / Diffusion[3] |
| Tool type | — | vertical furnace for semiconductor processing[3] |
| Wafer size | — | 12 inch[2] |
| Process | — | ALDZROX 2.2[4] |
| Process temperature | — | 300C[4] |
| Wafer type | — | 300mm-Si SEMI STD-Notch[4] |
| Quantity of production wafers | — | 100wfr[4] |
| Boat operation | — | 2 Boat Operation (B/S)[4] |
| Boat type | — | 117 slots Ladder (8mm pitch)[4] |
| Boat material | — | Quartz[4] |
| Boat rotation | — | Yes[4] |
| Pedestal type | — | Quartz[4] |
| Cap heater | — | Yes[4] |
| Load lock | — | Yes[4] |
| O2 analyzer maker/model | — | NGK, SH-304 STANDARD[4] |
| Software version | — | Ver. 6.07 3.1.1[4] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →