Comparison ledger
Blue M 1200, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1200Blue M | |
|---|---|---|
| OEM | Blue M | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2010 SOP revision date | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 1200 | Varian 0332 F 9453 302 Diffusion |
| Cited variants | — | |
| Specifications | ||
| Equipment type | C box furnace[2] | — |
| Type | Box furnace[2] | — |
| Maximum temperature | 1200 °C[2] | — |
| Minimum temperature setpoint | 0 °C[2] | — |
| Controller | UP150 programmable controller[2] | — |
| Maximum program segments | 16 segments (SP1–SP16, tM1–tM16)[2] | — |
| Program end modes | Reset (shut off), Hold (hold temperature), Repeat (continuous)[2] | — |
| Nitrogen flowmeter maximum | 13 slpm[2] | — |
| PID coefficients | User-settable proportional (p), integral (I), derivative (d) via optimized table[2] | — |
| Alarm temperature setting | Typically 10 °C higher than highest process temperature[2] | — |
| Temperature rating | 1200 C[2] | — |
| Operating atmosphere | nitrogen flow[2] | — |
| Tube furnace type | split-hinge tube furnace[1] | — |
| Tube furnace configuration | horizontal or vertical use[1] | — |
| Tube furnace temperature control | independent digital temperature control modules[1] | — |
| Tube furnace control type | multisegment[1] | — |
| Tube furnace temperature range | 100 C to 1200 C[1] | — |
| Asset Number | — | 142841[3] |
| Last Confirm Date | — | October 14, 2025[4] |
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