Waferpedia

Comparison ledger

017-0024-01 PrealignerversusIQA 0048 Mask

Brooks 017-0024-01 Prealigner, EV Group IQA 0048 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksEV Group
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerEV Group IQA 0048 Mask
Specifications
OEM—EVG[1]
Model—IQA 0048[1]
Equipment type—Mask Aligner[1]
Vintage—2012[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing