Comparison ledger
Brooks 017-0024-01 Prealigner, Nikon NSR 2005 i 11 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer Loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Nikon NSR 2005 |
| Specifications | ||
| Illumination WL | — | i-line[1] |
| Illumination uniformity | — | 2.00%[1] |
| CD unifotmity | — | 400nm[1] |
| Overlay (single machine) | — | 70nm[1] |
| Reticle size | — | 5"[1] |
| Lens reduction | — | 1/5[1] |
| Control System | — | VAX Station[2] |
| Configuration | — | Modules:[3] |
| Wafer size | — | Wafer Loader[2] |
| AC Power Distribution System | — | Electricity Box[3] |
| Manufacturer | — | Nikon[2] |
| Model | — | NSR 2005 i 11 D[2] |
| Category | — | Lithography[2] |
| CD uniformity | — | 400nm[1] |
| Modules | — | Operation Panel; Retical Loader; Wafer Loader; Lens Controller; AC Power Distribution System: Electricity Box[3] |
| Vintage | — | 1996[1] |
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