Comparison ledger
Brooks 017-0024-01 Prealigner, OAI 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | 200OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | OAI 200 |
| Specifications | ||
| OEM | — | OAI[1] |
| Model | — | 200[1] |
| Tool owner | — | Brian Baker[1] |
| Serial number | — | 1213[1] |
| Location | — | Bay B[2] |
| Substrate size accommodation | — | up to 6"x6"[3] |
| Mask size accommodation | — | 2"x2" to 7"x7"[3] |
| Maximum mask size (datasheet) | — | up to 9"x9"[4] |
| Alignment precision | — | 1 micron[5] |
| Vacuum Chuck X, Y travel | — | ±0.47" (12mm)[3] |
| Vacuum Chuck Z travel | — | ±0.12" (3mm)[3] |
| Vacuum Chuck rotation | — | ±7°[3] |
| Substrate Stage X, Y travel (datasheet) | — | ±10mm[4] |
| Z travel (datasheet) | — | 1500 microns[4] |
| Rotation (datasheet) | — | ±3.5°[4] |
| Lamp power range | — | 200W to 2000W[5] |
| UV wavelength range | — | Near or Deep UV (220nm to 436nm)[3] |
| Exposure intensity control | — | ±2% of desired intensity[5] |
| Timer range | — | 0-1000 seconds in 1 second intervals[3] |
| Dimensions (width) | — | 31 inches[3] |
| Dimensions (height) | — | 37 inches (datasheet: 37")[4] |
| Weight | — | 250 lbs[4] |
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