Waferpedia

Comparison ledger

017-0146-01 PrealignerversusFPA 3000 i 5 + Fine Pattern

Brooks 017-0146-01 Prealigner, Canon FPA 3000 i 5 + Fine Pattern, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
FPA 3000 i 5 + Fine PatternCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerCanon FPA 3000
Cited variants—
  • Canon FPA 3000 i 5 + Fine Pattern Aligner[1]
  • FPA 3000 i 5 + Fine Pattern Aligneri-line[1]
Specifications
Configuration—Main 1:[2]
Phase—3 Phase[2]
Wafer sizes supported—6 inch[3]
Power supply main 1—3 Phase - 3 Wire - 50/60 Hz[2]
Power supply main 2—1 Phase - 2 Wire - 50/60 Hz[2]
Vintage—1997[2]
017-0146-01 Prealigner entryFPA 3000 i 5 + Fine Pattern entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing