Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon i 12 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | i 12 DNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon i 12 D |
| Specifications | ||
| Version | — | 150 mm[1] |
| Resolution | — | 0.35μm or less (High resolution, positive resist film of 1.0μm thickness )[1] |
| Configuration | — | Focus Calibration Repeatability:[1] |
| Measurement of Initial Heat | — | 180 min[1] |
| Measurement of Initial Cool | — | 240 min[1] |
| Reticle Blind Setting Accuracy | — | + 0.4 to + 0.8 mm (on reticle)[1] |
| Wafer size | — | Wafer Equipment[3] |
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