Waferpedia

Comparison ledger

ABM ATM 405 Atmospheric Wafer Handling Robotversus2014-09-11T12

Brooks ABM ATM 405 Atmospheric Wafer Handling Robot, Koh Young 2014-09-11T12, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
2014-09-11T12Koh Young
OEMBrooksKoh Young
CategoryAssembly / SMTAssembly / SMT
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks ABM ATMKoh Young 2014-09-11T12
Specifications
ConfigurationSingle Arm[1]—
ManufacturerBrooks[1]—
MakeBrooks / PRI[2]—
ModelABM / ATM 405[2]—
Tool typeAtmospheric wafer handling robot[2]—
Wafer sizes612 inch[2]—
Semiconductor Solutions—Listed as one of the company’s business areas[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org