Waferpedia

Comparison ledger

Ecomet 6versus120 Continuous

Buehler Ecomet 6, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomet 6Buehler
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomet 6Lapmaster 120 Continuous
Specifications
TypeVariable speed grinder/polisher[1]—
Chuck diameter8 inches[1]—
Max speed340 rpm[1]—
Water requirementRequired[1]—
Electrical115V 60Hz 15A[1]—
Dimensions (L x W x H)30 x 30 x 16 inches[2]—
Weight160 lb[2]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]yorkscientific.comyorkscientific.com
  2. [2]hgrinc.comhgrinc.com