Comparison ledger
Canon FPA 2500 i 3 i-Line, Nikon NSR 2205 i 11 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 2500 i 3 i-LineCanon | |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 2500 | Nikon NSR 2205 |
| Specifications | ||
| Reticle Size | 5"[2] | — |
| Wafer Type | Notch[2] | — |
| Auto Feed | Left Hand[2] | — |
| Chuck Type | Ring[2] | — |
| Optional Parts | Canon Reticle Charger[2] | — |
| Track Interface / Type | Yes[2] | — |
| Configuration | Software version; VS 5.26 BW[2] | With HDD & Software[5] |
| Date | 6/19/2023[2] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 517[2] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.5[2] | — |
| IUC Uniformity NA/Sigma mode (50/70) | N/A[2] | — |
| IUC Distribution NA/Sigma mode (50/70) | N/A[2] | — |
| Reticle Barcode | Canon[3] | — |
| Track interface / Type | Yes / Tel[3] | — |
| Software Version | VS 5.26 BW[3] | — |
| Wafer Size | 8 inch[2] | — |
| Track Interface | Yes / Tel[3] | — |
| Optional Part | Canon Reticle Charger[2] | — |
| Lamp Power | — | 570.2 mW / cm2[5] |
| Uniformity | — | 1.17%[5] |
| TFD | — | 0.410 µm[5] |
| Astigmatism | — | 0.328 µm[5] |
| Make | — | Nikon[1] |
| Model | — | NSR 2205 i 11 D[1] |
| Type | — | i-line stepper[1] |
| Wafer size | — | 4 inch[1] |
| Vintage | — | 1995[1] |
| Included accessories | — | HDD and software[5] |
| Stepping 3 sigma X | — | 17 nm[5] |
| Stepping 3 sigma Y | — | 20 nm[5] |
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