Comparison ledger
Canon FPA 3000 i 4 i-Line, Nikon NSR 2205 i 11 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 3000 i 4 i-LineCanon | |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | Nikon NSR 2205 |
| Specifications | ||
| Reticle size | 6"[2] | — |
| Wafer type | Notch[2] | — |
| Auto feed | Left hand[2] | — |
| Chuck type | Pin[2] | — |
| GBR unit | No[2] | — |
| Cassette barcode | No[2] | — |
| Reticle barcode | No[2] | — |
| Track interface/type | Yes, DNS[2] | — |
| Software version | V4.08B.09[2] | — |
| Configuration | Missing parts:[2] | With HDD & Software[5] |
| Date of lens data | 4/3/2020[2] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 9087[2] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.753[2] | — |
| Wafer Size | 8 inch[3] | — |
| Reticle Size | 6 inch[2] | — |
| Track Interface | Yes, DNS[2] | — |
| Missing Parts | PCBs from D-Rack, Main computer[2] | — |
| Lens Data Date | 4/3/2020[2] | — |
| Vintage | 1994[3] | 1995[1] |
| Lamp Power | — | 570.2 mW / cm2[5] |
| Uniformity | — | 1.17%[5] |
| TFD | — | 0.410 µm[5] |
| Astigmatism | — | 0.328 µm[5] |
| Make | — | Nikon[1] |
| Model | — | NSR 2205 i 11 D[1] |
| Type | — | i-line stepper[1] |
| Wafer size | — | 4 inch[1] |
| Included accessories | — | HDD and software[5] |
| Stepping 3 sigma X | — | 17 nm[5] |
| Stepping 3 sigma Y | — | 20 nm[5] |
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