Comparison ledger
Canon FPA 5500 iZa, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 5500 iZaCanon | 1505 G 6 ENikon |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 5500 iZa | Nikon 1505 |
| Cited variants |
| — |
| Specifications | ||
| Manufacturer | Canon[2] | — |
| Model | FPA 5500 iZa[2] | 1505 G 6 E[5] |
| Category | Lithography[3] | Stepper[5] |
| Tool type | Stepper / Scanner[2] | — |
| Wafer size | 300mm[4] | — |
| Wafer chuck type | Pin chuck[4] | — |
| Projection lens magnification | 1:4[4] | — |
| NA | Variable (0.57~0.45 / 0.01 resolution)[4] | 0.54[6] |
| Exposure light | i Line (365nm)[4] | — |
| Light source | Ultra high-pressure mercury lamp[4] | — |
| Light source manufacturer/model | Ushio Inc. / SUV-4500CIL[4] | — |
| Reticle storage | 14ea (Standard), Nikon type 15ea (Total 29ea)[4] | — |
| Reticle barcode reader | 2D[4] | — |
| Configuration | — | 5" reticle[5] |
| Resolution | — | 650 nm[6] |
| Numerical Aperture | — | 0.54[6] |
| Reduction | — | 5x[6] |
| Exposure Field | — | 15 x 15 mm[6] |
| Alignment Accuracy | — | 130 nm[6] |
| Wafer Size | — | 4 inch[5] |
| Light Source | — | g-line[7] |
| Introduction Year | — | 1988[6] |
| NA (Numerical Aperture) | — | 0.54[6] |
| Make | — | Nikon[5] |
| Wafer Sizes | — | 4 inch[5] |
| Exposure type | — | g-line[6] |
| Exposure field | — | 9.3 x 18.8 mm[6] |
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