Waferpedia

Comparison ledger

100 SpinversusWS-650-15B

CEE 100 Spin, Laurell WS-650-15B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WS-650-15BLaurell
OEMCEELaurell
CategoryResist ProcessingResist Processing
Wafer size—300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Laurell WS-650-15B
Specifications
ConfigurationVolts 115[1]—
Model type—spin coater[2]
Series—650 Series[2]
Max substrate size—300mm (9" x 9")[2]
Max RPM—12,000 rpm[2]
Mounting options—Tabletop, In-Deck, On-Deck[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]laurell.comlaurell.com