Waferpedia

Comparison ledger

1000 Hot PlateversusMK 5

CEE 1000 Hot Plate, Heller MK 5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MK 5Heller
OEMCEEHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateHeller MK 5
Specifications
Configuration4"[1]1936 MK5 or 1913 MK5[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing