Waferpedia

Comparison ledger

1000 Hot PlateversusPB12P-CP

CEE 1000 Hot Plate, YES PB12P-CP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced—1980
Production run—1980–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateYES PB12P-CP
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Product line—Manual batch and automated polyimide/BCB/copper anneal vacuum ovens[2]
Listed model—PB12P-CP[2]
OEM—Yield Engineering Systems[3]
Category—Thermal / Diffusion[3]
Equipment type—Manual batch and automated polyimide/BCB/copper anneal vacuum oven[2]
Processes—Polyimide anneal, BCB anneal, copper anneal[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]waferpedia.comwaferpedia.com