Comparison ledger
CEE 300 Bake Plate, SUSS MicroTec ACS 300 Gen 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACS 300 Gen 2SUSS MicroTec | |
|---|---|---|
| OEM | CEE | SUSS MicroTec |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 300 Bake Plate | SUSS MicroTec ACS 300 |
| Cited variants | — | |
| Specifications | ||
| Wafer size | up to 300mm wafer[2] | System tooling for 200/300 mm semi spec wafer sizes[4] |
| Software | Internal OS[2] | — |
| Voltage | 208V[2] | — |
| Max Substrate Size | 300mm round or 12" x 12" square[1] | — |
| Min Substrate Size | 4 inch round[1] | — |
| Max Temperature | 300°C (400°C optional)[1] | — |
| Temperature Resolution | 0.1°C[1] | — |
| Temperature Uniformity | ±0.3% across working area[1] | — |
| Smart Pin Height Range | 0-19 mm[1] | — |
| Weight (machine only) | 146 lb (66.2 kg)[3] | — |
| Dimensions | 18" H x 18.75" W x 26.25" D[3] | — |
| Power | 3100-4100 watts[3] | — |
| Exhaust Port | 2" (50.8mm) OD[3] | — |
| Configuration | — | Includes:[4] |
| OEM | — | SUSS MicroTec[5] |
| Model | — | ACS 300 Gen 2[6] |
| Equipment type | — | Coater / Developer[4] |
| Automation | — | fully automatic[5] |
| Architecture | — | modular[5] |
| Process modes | — | spin-coating and spray-coating[5] |
| Integrated functions | — | coat, bake, and develop modules[4] |
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