Waferpedia

Comparison ledger

321versusDFD 6361 Automatic Dicing

Disco 321, Disco DFD 6361 Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco DFD
Specifications
OEMDisco[1]Disco[6]
Model321[1]DFD 6361[6]
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Phase—3 Phase[4]
Configuration—3 Wire + Ground[4]
Full Load Current—18 A[5]
Machine Main Breaker Rating—20 A[5]
Ampere Rating of Largest Load—8 A[5]
Product type—Automatic dicing saw[6]
Power supply—3 Phase - 3 Wire + Ground - 50/60 Hz[4]
Voltage—200 - 240 VAC[5]
Make—Disco[6]
Type—Automatic Dicing Saw[6]
Vintage—2012[6]
Electrical requirements—200 - 240 VAC - 3 Phase - 50/60 Hz - Full Load Current: 18 A - Machine Main Breaker Rating: 20 A - Ampere Rating of Largest Load: 8 A[5]
Power—3 Phase - 3 Wire + Ground - 50/60 Hz[4]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]Equipment inventory listing