Waferpedia

Comparison ledger

3220versusDFD 6362

Disco 3220, Disco DFD 6362, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DFD 6362
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Max workpiece size—Φ300 mm[3]
X-axis cutting range—310 mm[3]
Cutting speed—0.1 – 1000 mm/s[3]
Y1/Y2 cutting range—310 mm[3]
Index step—0.0001 mm[3]
Positioning accuracy (X axis)—Within 0.002 mm / 310 mm (Single error)[3]
Z-axis max stroke—14.7 mm (for Φ2 inch blade); 14.9 mm (for Φ3 inch blade)[3]
θ-axis max rotating angle—380 deg[3]
Spindle rated torque (1.2 kW / high-speed rotation)—0.19 N·m[3]
Spindle rotation speed range (1.2 kW / 1.8 kW)—6,000 – 60,000 min⁻¹[3]
Spindle rotation speed range (high-speed rotation)—20,000 – 80,000 min⁻¹[3]
Equipment dimensions (W×D×H)—1,200 × 1,550 × 1,800 mm[3]
Equipment weight—Approx. 2,050 kg[3]
Power supply phase—3 Phase[4]
Power frequency—50/60 Hz[4]
Voltage range—308 – 415 VAC ±10%, 3 Phase[4]
Full load current—9 A[4]
Machine main breaker rating—20 A[4]
Standard spindle power—1.2 kW[5]
Optional spindle powers—1.8 kW or 2.2 kW[5]
Wafer size—300 mm[5]
Vintage—2010[5]
Serial number—NL1049[5]
Cassette type—Dual-stack cassette handler for 300 mm[5]
BCR system—Yes[5]
Touch screen display—Yes[5]
Automatic wheel covers—Yes[5]
Air ionizer—Yes[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]disco.com.sgdisco.com.sg
  4. [4]waferpedia.comwaferpedia.com
  5. [5]agsemiconductor.comagsemiconductor.com