Waferpedia

Comparison ledger

LambdaversusHVM3

Finetech Lambda, MRSI HVM3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Packaging & Bonding, null[1]
Side-by-side comparison of selected equipment models
Attribute
LambdaFinetech
HVM3MRSI
OEMFinetechMRSI
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run—2018–
Lifecycle——
Lifecycle milestones—2019 Name change
Control system——
Generation——
FamilyFinetech LambdaMRSI HVM3
Cited variants
  • FINEPLACER lambda 2[1]
Specifications
Accuracy0.5 um[4]—
Configuration50 x 50 mm Heating Plate with Gel/Waffle Pack station[4]—
Power80W Contact Chip Heater (CCH) with a single heated tool[4]—
Placement Accuracy0.5 μm (sub-micron)[4]—
Bond Force Range0.2-20 N[4]—
Heating Plate Size50 × 50 mm[4]—
Side Process CameraIncluded[4]—
Y Axis Camera ShifterIncluded[4]—
Fine Theta Adjustment on Bond HeadIncluded[4]—
Dispense Syringe Mount HardwareIncluded (no controller)[4]—
Operating SystemWindows 10 Pro[4]—
Bonding TechnologiesThermocompression and ultrasonic[6]—
Inert/Process Gas EnclosureIncluded (on asset 153908)[5]—
XY & Coplanarity Calibration KitIncluded (on asset 153908)[5]—
SoftwareFinetech Software[4]—
Placement Accuracy (description)sub-micron[6]—
Heating Plate50 x 50 mm with Gel/Waffle Pack station[4]—
Control SystemWindows 10 Pro PC[4]—
Fine Theta AdjustmentPresent on bond head[4]—
Dispense Syringe MountHardware only (no controller)[4]—
Bond Line Adjust/Control ModulePresent[4]—
Contact Chip Heater80W (CCH) with single heated tool[5]—
Substrate Heater (optional)100 x 100 mm with Gel/Waffle Pack station[4]—
Placement accuracySub-micron placement accuracy[6]3 microns, 3 sigma, true radial placement (depending on application)[7]
Bond technologiesThermocompression and ultrasonic technologies[6]—
Heating plate50 x 50 mm Heating Plate with Gel/Waffle Pack station[4]—
Bond force range0.2-20N Bond Force Module[4]—
Bond head theta adjustmentFine Theta Adjustment on Bond Head[4]—
VisionSide Process Camera[4]—
Camera shifterY Axis Camera Shifter[4]—
Adhesive dispensing hardwareDispense Syringe Mount Hardware – no controller[4]—
Process gas enclosureInert/Process Gas Enclosure[5]—
Contact chip heater80W Contact Chip Heater (CCH) with a single heated tool[5]—
Calibration kitXY & Coplanarity calibration kit[5]—
Control PCWindows 10 Pro PC, Keyboard, Mouse & Monitor[4]—
Bond line controlBond Line Adjust/Control Module[4]—
Application—Microwave modules, hybrid, optical modules, epoxy and eutectic die bonding[7]
Placement repeatability—≤ 1 micron[7]
XY motors—Brushless DC linear motors with glass-scale encoder resolution of 50 nm[7]
X travel—17.5 in (444.5 mm)[7]
Y travel—36.0 in (914.4 mm)[7]
Z travel—1.5 in (38.1 mm)[7]
Theta travel—360°[7]
Theta resolution—0.0045°[7]
Pressure control—10 g to 5 kg per placement[7]
Cameras—2 down-looking cameras sharing an optical path; 1 up-looking camera[7]
Vision system—Edge detection and pattern recognition[7]
Lighting—Red, green, and blue; ring or coaxial illumination; programmable intensity[7]
Pickup nozzles—13 in standard nozzle changer; multiple changers optional; can also carry epoxy dispensing heads[7]
Waffle packs—Up to 72 2 x 2 in waffle packs (50.8 x 50.8 mm) or Gel-Paks™ or 4 x 4 in (101.6 x 101.6 mm)[7]
Tape and reel feeders—Up to ten 8 mm tape and reel feeders[7]
Eutectic bonding—Programmable ramp rate; maximum temperature 450°C[7]
Process gases—Nitrogen, argon, N2-H2, or Ar-H2[7]
Dispense pumps—2 syringe rotary screw pumps or time/pressure-controlled pumps[7]
Dispense height sensing—3-point laser height mapping of the substrate plane[7]
Dispense needle cleaning—Automated programmable cleaning between pattern dispense intervals[7]
Dispense needle calibration—Automatic software calibration using beam sensor[7]
Repeatability—≤ 1 µm[7]
Minimum chip size—0.008 sq. inch (200 sq. micron)[7]
Illumination—RGB; ring or coaxial; intensity programmable[7]
Eutectic temperature—up to 450ºC[7]
Minimum placement force (closed loop)—10 g[7]
Maximum placement force (closed loop)—5 kg[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]finetechusa.comfinetechusa.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]mycronic.commycronic.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]epfl.chepfl.ch
  7. [7]web.archive.orgweb.archive.org