Waferpedia

Comparison ledger

3828-46versus15 Lapper

GigaMat 3828-46, Lapmaster 15 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3828-46GigaMat
15 LapperLapmaster
OEMGigaMatLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3828-46Lapmaster 15
Specifications
Number Of Conditioning Rings—Up to 3[1]
Ring ID—Up to 5.5″[1]
Plate Diameter – Outside—15″[1]
Plate Diameter – Inside—3 1/2″[1]
Standard RPM—60[1]
Drive Motor—1/2 HP[1]
Electrics—110V / 1Ph / 60Hz[1]
Dimensions – Approximate—26″(L-R) x 21″(F-B) x 22″(H)[1]
Configuration—Equipped with:[1]
Equipped with: 15″ Cast Iron Plate—Included[1]
Equipped with: (3) Yoke/Roller Bearing Assemblies—Included[1]
Equipped with: (3) Conditioning Rings—Included[1]
Equipped with: (3) Hold Downs—Included[1]
Equipped with: 30 Minute Timer—Included[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing