Comparison ledger
Heidelberg Instruments DWL66, Nikon NSR 2205 i 8 A i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DWL66Heidelberg Instruments | |
|---|---|---|
| OEM | Heidelberg Instruments | Nikon |
| Category | Lithography | Lithography |
| Wafer size | 6" | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heidelberg Instruments DWL66 | Nikon NSR 2205 |
| Cited variants |
| — |
| Specifications | ||
| Resolution | 40 nm, 100 nm, 200 nm, 400 nm[2] | 0.5µm[3] |
| Minimum feature | 0.5 µm[2] | — |
| Laser sources | 244 nm, 363 nm, 413 nm, 442 nm[2] | — |
| Substrates | glass, silicon or any other flat materials[2] | — |
| Exposure | photoresist[2] | — |
| Image size | 140 mm x 140 mm[2] | — |
| Substrate size | up to 200 mm by 200 mm[1] | — |
| Computer Type | — | PDP11[3] |
| Rentical Size | — | 5 Inch[3] |
| Field Sizes | — | 15 / 17.5 / 20mm[3] |
| Wafer Size | — | 6 Inch Flat[3] |
| Reticle Libraries | — | 1[3] |
| Wafer Loader | — | Type 1[3] |
| Wafer size | — | Wafer Loader Pre-alignment 2[3] |
| Configuration | — | Barcode Reader[3] |
| Wafer Loader Indexers | — | 2[3] |
| Autofocus | — | Single Point[3] |
| Chuck Type | — | Ceramic Ring Chuck[3] |
| Water Stage | — | Ballscrew[3] |
| MCS2 Version | — | 2.4B[3] |
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