Waferpedia

Comparison ledger

788versus0332 F 9453 302 Diffusion

Heller 788, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
788Heller
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 788Varian 0332 F 9453 302 Diffusion
Specifications
oven typein-line, continuous cure, vertical format oven[1]—
thermal zonesfour internal thermal zones[1]—
controlsindependent time and temperature controls[1]—
cycle timeas short as 25 seconds[1]—
curing timefrom a few minutes to several hours[1]—
footprintas small as 72 inches (183 cm)[1]—
product width range2 to 18 inches (5 to 46 cm)[1]—
product thickness rangeas thin as 0.015 inch (0.4 mm)[1]—
atmosphereair or nitrogen[1]—
clean room compatibilityClass 1,000 or 10,000 clean room compatibility[1]—
board supportcenter board support for ultra-thin boards[1]—
conveyor width adjustabilityadjustable from 2 to 18 inches (5 to 46 cm)[1]—
pitch between product carriers3/8 to 1 1/2 inches (9.5 to 38 mm) in 3/8-inch (9.5 mm) increments[1]—
heatingforced convection heating[1]—
interfacemagazine loader interface[1]—
softwareWindows software[1]—
standardsSMEMA compatibility; meets CE standards[1]—
Cycle time (minimum)25 seconds[1]—
Curing time (maximum)4 hours[1]—
Footprint (minimum)72 inches (183 cm)[1]—
Height options7, 8, 9, 10 feet (213, 244, 274, 305 cm)[1]—
Number of thermal zones4[1]—
Clean room compatibilityClass 1,000 or 10,000[1]—
Conveyor width range2 to 18 inches (5-46 cm)[1]—
Minimum product thickness0.015 inch (0.4 mm)[1]—
Asset Number—142841[2]
Last Confirm Date—October 14, 2025[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]Equipment inventory listing
  3. [3]fab-spares.comfab-spares.com