Hitachi
SU 8030 FEG-SEM alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
LEO
1550
4"
Metrology & Inspection
The Zeiss LEO 1550 is a scanning electron microscope listed in the FIB / SEM / EDX / ProSEM section. The Zeiss LEO 1550 is associated with SEM imaging and sample holders for 4 inch wafers, 6 inch wafers, and 6 inch masks.
Zeiss
Merlin
4"
Metrology & Inspection
Zeiss MERLIN is a scanning electron microscope at CMi reserved for imaging and process-control inspection, with support for imaging, EDX analysis, and offline analysis in ProSEM.
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
.498 PSL Wafer
Metrology & Inspection
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
Applied Materials
0010-18024 Pyrometer Assembly
Metrology & Inspection
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