Comparison ledger
J.A. Woollam RC2, OGP 0020 Contour Projector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RC2J.A. Woollam | |
|---|---|---|
| OEM | J.A. Woollam | OGP |
| Category | Precision Optics | Precision Optics |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | J.A. Woollam RC2 | OGP (Optical Gaging Products) 0020 Contour Projector |
| Specifications | ||
| Instrument type | Spectroscopic ellipsometer[1] | — |
| Measured quantities | Thicknesses and refractive indices of thin films[1] | — |
| Substrate size | Up to 200 mm wafers; chips with a surface larger than the cross section of the incident beam[1] | — |
| Light source | Xenon Arc lamp 75W[1] | — |
| Wavelength range | 210 nm to 2500 nm[1] | — |
| Spot size without focusing probes | 3 to 4 mm beam diameter[1] | — |
| Spot size with focusing probes | 120 microns beam diameter[1] | — |
| Stage | Motorized XY stage mapping[1] | — |
| Vertical motion | Motorized Z and autofocus[1] | — |
| Alignment | Automatic tilt alignment[1] | — |
| Software | CompleteEASE[1] | — |
| Equipment type | Spectroscopic ellipsometer[1] | — |
| Measurement capability | Measures thicknesses and refractive indices of thin films (transparent or not)[1] | — |
| Measureable material classes | Dielectric and semiconductor films (silicon dioxide, silicon nitride, polysilicon, amorphous silicon); metallic films; organic layers such as carbon and photosensitive resists[1] | — |
| Measurement principle | Measures the ratio of reflection coefficients Rp/Rs expressed as Ψ and Δ; refractive index (n) and thickness (t) are resolved by an algorithm from measured Ψ and Δ values[1] | — |
| Configuration | — | 50-60 Cycle[2] |
| Voltage | — | 115 V[2] |
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