Waferpedia

Comparison ledger

1.112 PSL Waferversus2832 C Dual-Channel Power Meter

KLA 1.112 PSL Wafer, Newport 2832 C Dual-Channel Power Meter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANewport
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferNewport 2832 C Dual-Channel Power Meter
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
OEM—Newport[3]
Model—2832 C[3]
Type—Dual-Channel Power Meter[3]
Device type—Dual-Channel Power Meter[3]
Referenced designation—2832-C Dual-Channel Power Meter[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]atlantis-press.comatlantis-press.com