Comparison ledger
KLA 1.112 PSL Wafer, Nikon Optiphot150, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Optiphot150Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Nikon Optiphot150 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Model | — | Nikon Optiphot 150[3] |
| Type | — | inspection microscope[3] |
| Inspection microscope without camera locations | — | Z11, Z17[3] |
| Head type | — | Three-eye erecting head[4] |
| Eyepiece | — | WF10X (F.N.20mm)[4] |
| Objective lenses | — | CF PLAN 5X, 10X, 20X, 50X, 100X[4] |
| Illumination | — | 12V100W halogen incident light source[4] |
| Stage | — | Large 6-inch mobile platform[4] |
| Stage platform | — | Large 6-inch mobile platform[4] |
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