Comparison ledger
KLA 1007, Micromanipulator P 300 J Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | P 300 J WaferMicromanipulator |
|---|---|---|
| OEM | KLA | Micromanipulator |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Micromanipulator P 300 J Wafer |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 300 mm[3] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Stage range | — | 300 x 300 x 50 mm, theta 15 degrees[3] |
| Resolution | — | 0.1 micron (stage, platen, microscope drive)[3] |
| Microscope drive range | — | 100 x 100 mm (X-Y), 200 mm (Z)[3] |
| Station dimensions (W x D x H) | — | 33 x 40 x 33 inches (84 x 102 x 84 cm)[3] |
| Station weight | — | 480 lbs (218 kg)[3] |
| RMC-7 controller dimensions | — | 17.8 x 19.7 x 5.5 inches (45.2 x 50 x 13.9 cm)[3] |
| RMC-7 controller weight | — | 24 lbs (11 kg)[3] |
| Vacuum requirement | — | 25 in-Hg[3] |
| Controller power input | — | 85 to 265 VAC, 47-63 Hz, 2.4 Amps typical[3] |
| Temperature ranges (configurable) | — | Ambient to 300°C, 0°C to 300°C, -55°C to 300°C[4] |
| Platen material | — | Magnetic stainless steel[3] |
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