Comparison ledger
KLA 1007, Seiko Epson NS 6040 High Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | NS 6040 High SpeedSeiko Epson |
|---|---|---|
| OEM | KLA | Seiko Epson |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Seiko Epson NS 6040 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Voltage | — | 220 VAC (Single Phase)[3] |
| Configuration | — | 50/60HZ, 6KVA max[3] |
| Temperature | — | Hot 125°C & Ambient 25°C[4] |
| Power consumption | — | 6 kVA max[3] |
| Air pressure | — | 0.49 MPa[3] |
| Main axis motor | — | 400W AC servo[3] |
| I/O arm axis motor | — | 100W AC servo[3] |
| Z axis motor (first) | — | 2W stepping[3] |
| X axis motor | — | 200W AC servo[3] |
| U axis motor | — | 200W AC servo[3] |
| Z axis motor (second) | — | 200W AC servo[3] |
| Shuttle motor | — | 100W AC servo[3] |
| Tray handling robot motor | — | 100W AC servo[3] |
| Tray loader/unloader motor | — | 6W induction[3] |
| Temperature range | — | Room ambient to 125°C[3] |
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