Comparison ledger
KLA .204 PSL Wafer, Nikon Labophot 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Labophot 2Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon Labophot 2 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Polarizing[3] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Optical System | — | Nikon CF optical system[4] |
| Illumination | — | 6V-20W halogen lamp with Köhler illumination and variable control potentiometer[4] |
| Lamp (alternative) | — | 6V-30W halogen bulb (Philips special type)[5] |
| Focusing (coarse) | — | 12mm per rotation[5] |
| Focusing (fine) | — | 0.1mm per rotation, each graduation 1 micron[5] |
| Objectives (standard) | — | E Plan 4/0.1 160/-, E Plan 10/0.25 LWD, E Plan 40/0.65 160/0.17 in a quintuple nosepiece[4] |
| Eyepieces (standard) | — | Two CFWN 10x/20[4] |
| Stage (standard) | — | Mechanical slide stage[4] |
| Condenser (standard) | — | Abbe 1.25 brightfield condenser[4] |
| Eyepiece tube inclination | — | 30 degrees (Seidentoph design)[4] |
| Phase Contrast | — | Can use Green interference filter (GIF) for phase difference microscopy[5] |
| Illumination Type | — | 6V-30W halogen bulb (special Philips type); Köhler illumination[5] |
| Lamp Power | — | 6V, 20W (standard) or 6V-30W (replacement bulb)[4] |
| Nosepiece | — | Quintuple nosepiece; forward or rear facing[4] |
| Eyepieces (Oculars) | — | CFWN 10x/20 eyepieces (standard); 10X widefield adjustable eyepieces[4] |
| Objectives (standard configuration) | — | E Plan 4/0.1 160/-, E Plan 10/0.25 LWD, E Plan 40/0.65 160/0.17[4] |
| Objective Magnifications Available | — | 4X, 10X, 20X, 40X, 50X, 100X[6] |
| Stage | — | Mechanical rectangular or circular rotatable with six minute vernier gradations; graded adjustable stage[4] |
| Focusing Movement | — | Coarse focus knob moves stage 12mm per rotation; fine focus knob moves stage 0.1mm per rotation (1 micron per graduation)[5] |
| Condenser Centering | — | Centering screws provided; quick-change condenser mount without re-adjusting centering screws[4] |
| Filter Holder | — | Quick-change filter holder (ND filter cassette, filter receptacle)[5] |
| Make | — | Nikon[3] |
| Model | — | Labophot 2[3] |
| Microscope type | — | Polarizing microscope[3] |
| Ocular lenses | — | 10X ocular lenses[6] |
| Objectives | — | Five objective lenses: 100X, 50X, 40X, 10X, and 4X[6] |
| Head | — | Trinocular head with C-mount camera coupler[7] |
| Eyepieces | — | 10X widefield adjustable eyepieces[7] |
| Fluorescence illuminator | — | Fluorescence vertical illuminator[7] |
| Lamp house | — | 100 watt mercury lamphouse[7] |
| Power supply | — | 100 watt mercury power supply[7] |
| Phase contrast condenser | — | Turret style phase contrast condenser with phase 1, 2, 3, darkfield, and brightfield stops[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →