Comparison ledger
KLA .496 PSL Wafer, Thermo Fisher Scientific FEI Quanta 200 3 D FEG Dual Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 200 3 D FEG Dual BeamThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Configuration | NIST Traceable[1] | Ion column Sidewinder[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Tool type | — | Dual beam microscope[3] |
| Ion column | — | Sidewinder[3] |
| Column | — | FEG NG column[3] |
| FEG column resolution at 30 kV | — | <1.2 nm[3] |
| Ion column max beam current | — | 65 nA[3] |
| Resolution at 30 kV | — | <7 nm[3] |
| Software | — | FEI operating software XT3.6.8[3] |
| Operating system | — | Windows XP[3] |
| Auto TEM | — | G2[3] |
| Auto Slice and View | — | Included[3] |
| Auto Fib | — | Included[3] |
| Drift correction | — | Included[3] |
| Gasses | — | Pt Deposition; Carbon[3] |
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