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.498 PSL WaferversusSurfscan 6420 Unpatterned Surface

KLA .498 PSL Wafer, KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Surfscan 6420
Specifications
ConfigurationNIST Traceable[1]16A[3]
NIST traceabilityYes[1]—
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
Make—KLA[3]
Model—Surfscan 6420[3]
Equipment type—Unpatterned Surface Inspection System[3]
Wafer size—8 inch[3]
Category—Metrology & Inspection[2]
Current—16A[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing